Boron implanting using a co-gas

ABSTRACT

An apparatus and methods of improving the ion beam quality of a halogen-based source gas are disclosed. Unexpectedly, the introduction of a noble gas, such as argon, to an ion source chamber may increase the percentage of desirable ion species, while decreasing the amount of contaminants and halogen-containing ions. This is especially beneficial in non-mass analyzed implanters, where all ions are implanted into the workpiece. In one embodiment, a first source gas, comprising a dopant and a halogen is introduced into an ion source chamber, a second source gas comprising a hydride, and a third source gas comprising a noble gas are also introduced. The combination of these three source gases produces an ion beam having a higher percentage of pure dopant ions than would occur if the third source gas were not used.

This application is a continuation of U.S. patent application Ser. No.14/949,421 filed on Nov. 23, 2015, which claims priority to U.S.Provisional Patent Application 62/087,071, filed Dec. 3, 2014, thedisclosures of which are incorporated herein by reference in itsentirety.

FIELD

Embodiments relate to an apparatus and methods for improving ion beamquality in an ion implantation system, and more particularly, improvingboron ion beam quality by using argon gas.

BACKGROUND

Semiconductor workpieces are often implanted with dopant species tocreate a desired conductivity. For example, solar cells may be implantedwith a dopant species to create an emitter region. This implant may bedone using a variety of different mechanisms. In one embodiment, an ionsource is used.

In an effort to improve process efficiency and lower cost, in someembodiments, the ions extracted from the ion source are accelerateddirectly toward the workpiece, without any mass analysis. In otherwords, the ions that are generated in the ion source are accelerated andimplanted directly into the workpiece. A mass analyzer is used to removeundesired species from the ion beam. Removal of the mass analyzerimplies that all ions extracted from the ion source will be implanted inthe workpiece. Consequently, undesired ions, which may also be generatedwithin the ion source, are then implanted in the workpiece.

This phenomenon may be most pronounced when the source gas is ahalogen-based compound, such as a fluoride. Fluorine ions and neutrals(metastable or excited) may react with the inner surfaces of the ionsource, releasing unwanted ions, such as silicon, oxygen, carbon, andaluminum and heavy metals present as impurity elements. Additionally,halogen ions may also be implanted into the workpiece.

Therefore, an apparatus and a method which improves beam quality,particular for embodiments in which halogen based source gasses areemployed, would be beneficial.

SUMMARY

An apparatus and methods of improving the ion beam quality of ahalogen-based source gas are disclosed. Unexpectedly, the introductionof a noble gas, such as argon, to an ion source chamber may increase thepercentage of desirable ion species, while decreasing the amount ofcontaminants and halogen-containing ions. This is especially beneficialin non-mass analyzed implanters, where all ions are implanted into theworkpiece. In one embodiment, a first source gas, comprising a dopantand a halogen is introduced into an ion source chamber, a second sourcegas comprising a hydride, and a third source gas comprising a noble gasare also introduced. The combination of these three source gasesproduces an ion beam having a higher percentage of pure dopant ions thanwould occur if the third source gas were not used.

According to one embodiment, a method of implanting dopant into aworkpiece is disclosed. The method comprises introducing a first sourcegas into a chamber of an ion source, the first source gas comprisingdopant and fluorine; introducing an additional source gas, selected fromthe group consisting of helium, argon, xenon, neon, and krypton, intothe chamber; ionizing the first source gas and the additional source gasin the chamber to form ions in the chamber; and accelerating the ions asan ion beam toward the workpiece, without the use of mass analysis. In afurther embodiment, the method further comprises introducing a secondsource gas comprising hydrogen and at least one of silicon andgermanium; ionizing the second source gas in the chamber; andaccelerating ions from the second source gas as part of the ion beam. Incertain embodiments, a composition of the ion beam is affected by anintroduction of the additional source gas.

According to a second embodiment, a method of implanting dopant into aworkpiece is disclosed. The method comprises introducing a first sourcegas into a first sub-chamber of a chamber of an ion source, the firstsource gas comprising a dopant and fluorine; introducing argon into asecond sub-chamber of the chamber; ionizing the first source gas and theargon in the chamber; extracting ions from the first sub-chamber in theform of a dopant ion beam and directing the dopant ion beam toward theworkpiece; extracting ions from the second sub-chamber in the form of anargon ion beam and directing the argon ion beam toward the workpiece,where the argon ion beam strikes a location on the workpiececoncurrently or after the location has been implanted by the dopant ionbeam. In a further embodiment, the method further comprises introducinga second source gas into the first sub-chamber, the second source gascomprising hydrogen and at least one of silicon and germanium; ionizingthe second source gas in the chamber; and extracting ions of the secondsource gas as part of the dopant ion beam. In certain embodiments, thedopant comprises boron.

According to a third embodiment, an apparatus for processing a workpieceis disclosed. The apparatus comprises an ion source, having a chamberdefined by chamber walls; a first source gas container, containing adopant and fluorine, in communication with the chamber; a second sourcegas container, containing hydrogen and at least one of silicon andgermanium, in communication with the chamber; a third source gascontainer, container at least one gas selected from the group consistingof helium, argon, xenon, neon, and krypton, in communication with thechamber; an RF antenna disposed on a dielectric window in one of thechamber walls; an extraction suppression electrode to attract ions fromwithin the chamber through an aperture in another of the chamber wallstoward the workpiece; and a workpiece support to hold the workpiece. Incertain embodiments, the dopant comprises boron. In certain embodiments,the ions are implanted in the workpiece without being mass analyzed.

BRIEF DESCRIPTION OF THE FIGURES

For a better understanding of the present disclosure, reference is madeto the accompanying drawings, which are incorporated herein by referenceand in which:

FIGS. 1A-C show implant systems according to different embodiments;

FIG. 2 is a representative graph of ion beam current as a function ofargon gas concentration;

FIG. 3 shows an implant system according to another embodiment.

DETAILED DESCRIPTION

As described above, ionization of halogen-based species, such asfluorides, may cause particles released from the inner surfaces of theion source to be implanted in the workpiece. These contaminants mayinclude aluminum, carbon, oxygen, silicon, fluorine-based compounds, andother unwanted species (including heavy metals present as impurityelements). One approach to address the damage caused by free halogenions may be to introduce additional source gasses.

FIGS. 1A-1C show various embodiments in which multiple source gasses maybe introduced to an ion source. In each of these figures, there is anion source 100. This ion source 100 includes a chamber 105 defined byplasma chamber walls 107, which may be constructed from graphite oranother suitable material. This chamber 105 may be supplied with one ormore source gasses, stored in one or more source gas containers, such asa first source gas container 170, via a gas inlet 110. This source gasmay be energized by an RF antenna 120 or another plasma generationmechanism. The RF antenna 120 is in electrical communication with a RFpower supply (not shown) which supplies power to the RF antenna 120. Adielectric window 125, such as a quartz or alumina window, may bedisposed between the RF antenna 120 and the interior of the ion source100. The ion source 100 also includes an aperture 140 through which ionsmay pass. A negative voltage is applied to extraction suppressionelectrode 130 disposed outside the aperture 140 to extract thepositively charged ions in the form of an ion beam 180 from within thechamber 105 through the aperture 140 and toward the workpiece 160, whichmay be disposed on a workpiece support 165. A ground electrode 150 mayalso be employed. In some embodiments, the aperture 140 is located onthe side of the ion source 100 opposite the side containing thedielectric window 125. As shown in FIG. 1A, a second source gas may bestored in a second source gas container 171 and introduced to thechamber 105 through a second gas inlet 111. A third source gas may bestored in a third source gas container 172 and introduced to the chamber105 through a third gas inlet 112. In another embodiment, shown in FIG.1B, a second source gas may be stored in a second source gas container171 and a third source gas may be stored in a third source gas container172. The second source gas and the third source gas may both beintroduced to the chamber 105 through the same gas inlet 110 used by thefirst source gas. In yet another embodiment, shown in FIG. 1C, thesecond source gas and the third source gas may be mixed with the firstsource gas in a single gas container 178. This mixture of gasses is thenintroduced to the chamber 105 through gas inlet 110.

In any of these embodiments, the first source gas, the second source gasand the third source gas may be introduced simultaneously orsequentially to the chamber 105. While these figures show the use ofthree different source gasses, the disclosure is not limited to anyparticular number. These figures intend to show various embodimentswhere multiple source gasses may be introduced to a chamber 105.However, other embodiments are also possible and within the scope of thedisclosure.

The first source gas, also referred to as the feed gas, may comprise adopant, such as boron, in combination with fluorine. Thus, the feed gasmay be in the form of DF_(n) or D_(m)F_(n), where D represents thedopant atom, which may be boron, gallium, phosphorus, arsenic or anotherGroup 3 or Group 5 element. The second source gas may be a moleculehaving a chemical formula of XH_(n) or X_(m)H_(n), where H is hydrogen.X may be a dopant species, such as any of those described above.Alternatively, X may also be an atom that does not affect conductivityof the workpiece 160. For example, if the workpiece 160 comprisessilicon, X may be a Group 4 element, such as silicon and germanium. Thethird source gas may be a noble gas, such as helium, argon, neon,krypton and xenon.

In other words, the first source gas may be BF₃ or B₂F₄, while thesecond source gas may be, for example, PH₃, SiH₄, NH₃, GeH₄, B₂H₆, orAsH₃. The third source gas may be a noble gas, such as helium, argon,neon, krypton or xenon, in each of these embodiments. This listrepresents possible species that may be used. It is understood thatother species are also possible.

By combining the first source gas with the second source gas, thedeleterious effects of the fluorine ions may be reduced. For example,without being limited to any particular theory, the introduction ofhydrogen may create a film or coating on the dielectric window 125. Thisserves to protect the dielectric window 125, which reduces the amount ofcontaminants originating from the dielectric window 125 that arecontained in the extracted ion beam 180. In addition, the second sourcegas may coat the inner surfaces of the plasma chamber walls 107, whichmay be another source of contaminants. This coating may reduce theinteraction between fluorine ions and the inner surfaces of the plasmachamber walls 107, reducing the amount of contaminants generated.

The introduction of the second source gas may reduce the creation ofcontaminants and the incorporation of these contaminants in the ionbeam. However, in some embodiments, the resulting ion beam producedusing the first source gas and the second source gas may not contain asufficient quantity of the desired ions.

FIG. 2 shows a plurality of bar graphs which show the ion speciesproduced by an ion source using BF₃ as the first source gas and GeH₄ asthe second source gas, with a varying amount of argon, which serves asthe third source gas. In each of these bar graphs, the RF power was 8kW, and the combined flow rate of the BF₃ and GeH₄ was 18 sccm.Additionally, the ratio of BF₃ to GeH₄ was held constant at 9:1.

In each of the bar graphs, it can be seen that the ion source 100ionizes the BF₃ to form boron ions (i.e. B⁺), as well as BF_(x) ⁺ ions,where BF_(x) includes BF and BF₂. Additionally, fluorine ions arecreated. Finally, a plurality of other ion species, which may becomponents of the second source gas or may be impurities, is alsocreated.

As described above, the introduction of the second source gas may reducethe amount of contaminants introduced in the ion beam. As stated above,this may be significant when the ion beam is used to implant theworkpiece without mass analysis.

Bar graph 250 shows the composition of an ion beam where no argon isintroduced. As seen in line 200, in this configuration, nearly 69% ofthe ions in the ion beam are dopant-containing ions, where, in thisexample, the dopant is boron. This metric is referred to as the boronfraction, or the dopant fraction. However, many of the dopant-containingions also contain fluoride, such as in the form of BF⁺, BF₂ ⁺ and BF₃ ⁺.In fact, as shown in line 210, only about 45% of the dopant-containingions are pure dopant (i.e. B+). This ratio is referred to as the boronpurity percentage, or the dopant purity percentage. Lastly, while 69% ofthe ion beam contains boron, a very large percentage of the ions alsocontain fluorine. In fact, line 220 shows the ratio of ions containingfluorine (which includes pure fluorine as well as BF⁺, BF₂ ⁺ and BF₃ ⁺)to pure dopant ions (i.e. B+). Line 220 shows that there are actuallymore fluorine-containing ions than pure boron ions. This metric isreferred to as the F/B ratio.

Bar graph 260 shows the composition of an ion beam where approximately19% of the total gas introduced to the ion chamber is the third sourcegas, which may be argon. Note that the total beam current ofdopant-containing ions (i.e. B+ and BF_(x)+) remains almost unchanged atabout 360 mA. However, there is a change in the composition of the ionbeam. Specifically, as seen on line 200, the boron fraction hasdecreased slightly, mostly due to the additional argon ions that havebeen created. However, surprisingly, as shown in line 210, thepercentage of pure dopant ions as compared to the total number ofdopant-containing ions (the boron purity percentage or dopant puritypercentage) has actually increased! In fact, the beam current of pureboron ions has also increased. Additionally, the ratio offluorine-containing ions to pure boron ions (i.e. the F/B ratio), asshown in line 220, has also decreased unexpectedly to about 100%.Additionally, the beam current of fluoride ions has decreased as well.In other words, the introduction of argon as a third source gas affectedthe composition of the resulting ion beam. Specifically, theintroduction of argon has increased the formation of pure boron ionsrelative to the total number of boron-containing ions. Interestingly,the introduction of argon has also decreased the ratio offluorine-containing ions to pure boron ions. As stated above, inembodiments where mass analysis is not performed, these changes mayimprove the performance of the implanted workpiece.

Each of these trends continues as a greater percentage of argon isintroduced. Bar graph 270 shows the composition of the ion beam whereabout 32% of all gas introduced into the chamber 105 comprises argon. Atthis concentration, the beam current of boron-containing ions begins todecrease slightly, from 360 mA to about 320 mA. The boron fraction hasalso decreased slightly due to the increased number of argon ions.However, other metrics have improved. Specifically, the boron puritypercentage actually increased to nearly 50%. Additionally, the F/B ratiodecreased to about 95%. Interestingly, the amount of other species,which includes all ions that are not boron-containing ions, fluorineions or argon ions, actually decreases at this argon percentage. Thebeam current of fluorine ions also decreases to less than about 20 mA.

Bar graph 280 shows the composition of the ion beam where about 48% ofall gas introduced into the chamber 105 comprises argon. At thisconcentration, the beam current of boron-containing ions again decreasesslightly, from 320 mA to about 300 mA. The boron fraction has alsodecreased slightly to about 60% due to the increased number of argonions. However, other metrics have improved. Specifically, the boronpurity percentage actually increased to over 50%. Additionally, the F/Bratio decreased to about 90%. Again, the beam current of the otherspecies has decreased as well. The beam current of fluorine ions alsodecreases to less than about 10 mA.

This unexpected result has many implications.

First, heavier dopant-containing ions, such as BF⁺, BF₂ ⁺ and BF₃ ⁺ tendto be implanted at a more shallow depth than pure dopant ions, such asB⁺. During the subsequent thermal treatment, these shallowly implantedions are more likely to diffuse out of the workpiece. In other words,the total beam current of all dopant-containing ions may not beindicative of the amount of dopant that is actually implanted andretained in the workpiece. Without wishing to be bound to any particulartheory, it is believed that the argon meta-stables in the plasma maybreak down the larger dopant-containing ions into more desirable puredopant ions.

Secondly, the implanting of fluorine, in any form, may be deleteriouseffects. The implanting of fluorine ions may cause defects in theworkpiece, which affects its performance. The implanted fluorine mayalso cause the dopants to diffuse out from the workpiece. Fluorine isalso known to retard the dopant diffusion into the workpiece, making theannealed dopant profile shallow, which is not preferable for solar cellapplications.

Third, the introduction of argon has a limiting effect on the generationof other species, also referred to as contaminants, that are generated.Without wishing to be bound to any particular theory, it is believedthat argon stabilizes the plasma, resulting in a reduction in chamberwall sputtering. Due to its large ionization cross-section, argon isrelatively easy to ionize and stabilizes the discharge. Because of this,the plasma is maintained at relatively low plasma potential, so that ionsputtering from the wall material can be reduced.

Fourth, during the implanting of the workpiece, the argon ions maysputter on the surface deposition layer of the workpiece. This may serveto remove any materials that are deposited during the implant process.Some of these materials may be difficult to remove via a wet chemistryprocess after the implant.

Thus, an ion beam having reduced beam impurity and increased dopantpurity can be created by using three source gasses. The first sourcegas, or feedgas, may be a species that contains both a dopant andfluorine, such as BF₃ or B₂F₄. The second source gas may be a speciesthat contains hydrogen and either silicon or germanium, such as silane(SiH₄) or germane (GeH₄). The third source gas may be argon or anothernoble gas. These three source gasses are introduced into a chamber 105of an ion source 100, either simultaneously or sequentially, where theyare ionized. The ion source may use RF energy generated by RF antenna120. In another embodiment, the ion source may utilize the thermionicemission of electrons using an IHC. Other methods of ionizing a gas mayalso be used by the ion source. Ions from all three source gasses areextracted through aperture 140 through use of extraction suppressionelectrodes 130 and ground electrode 150 and accelerated toward aworkpiece 160, where they are implanted into the workpiece 160. Asdescribed earlier, these ions may not be mass analyzed, meaning that allextracted ions are implanted into the workpiece 160.

The change in ion beam composition may also positively affect theconcentration of various species in the implanted workpiece. In onetest, a first workpiece implanted with B₂F₄ and GeH₄, in the ratiosdescribed above, was compared to a second workpiece implanted with thesame gasses with the addition of argon, in an amount of 30% of the totalgas introduced. It was found that at all depths of the workpieces, theconcentration of boron implanted in the second workpiece was greaterthan the concentration of boron in the first workpiece. Furthermore, itwas found that, at all depths, the concentration of fluorine was lowerin the second workpiece than in the first workpiece. In fact, theconcentration of fluorine at a depth of 40 nm was about 8E+19 in thefirst workpiece and only 6E+19 in the second workpiece, representing areduction of 25%. Similar reductions in fluorine concentration were seenat depths from about 35 nm up to 60 nm.

In another example, the second source gas may include a dopant havingthe opposite conductivity. For example, the first source gas, orfeedgas, may be a species than contains both boron and fluorine, such asBF₃ or B₂F₄. The second source gas may be a species that containshydrogen and a Group V element, such as phosphorus, nitrogen or arsenic.

While FIG. 2 shows the results when boron is used as the dopant in thefirst source gas, the disclosure is not limited to this embodiment.Other dopants, such as gallium, phosphorus, arsenic or other Group 3 andGroup 5 elements, may be used.

The above disclosure discusses that the third source gas may beintroduced in amounts ranging from about 19% to about 48%. However, thedisclosure is not limited to this range. In some embodiments, the thirdsource gas may be introduced in amounts ranging from about 15% to about30%. In other embodiments, the third source gas may be introduced inamounts ranging from about 15% to about 40%. In other embodiments, thethird source gas may be introduced in amounts ranging from about 15% toabout 50%. Additionally, the ratio of the first source gas to the secondsource gas may be about 9:1, although other ratios may also be used. Thecombined flow rate of the first source gas and the second source gas maybe between 10 and 20 sccm.

While the above description discloses the use of three source gasses, inother embodiments, two source gasses may be used. For example, in someembodiments, as described above, the first source gas may be in the formof DF_(n) or D_(m)F_(n), where D represents the dopant atom, which maybe boron, gallium, phosphorus, arsenic or another Group 3 or Group 5element. In certain embodiments, the second source gas is not used.Instead, only the first source gas and the third source gas are combinedin the ion source 100. In this embodiment, the flow rate of the firstsource gas may be between 10 and 30 sccm. In one embodiment, the thirdsource gas may constitute between 20% and 40% of the total gasintroduced to the chamber 105. In some embodiments, the third source gasmay be introduced in amounts ranging from about 15% to about 30%. Inother embodiments, the third source gas may be introduced in amountsranging from about 15% to about 40%. In other embodiments, the thirdsource gas may be introduced in amounts ranging from about 15% to about50%.

As described above, the introduction of argon with the BF_(x) gas mayaffect the composition of the resulting ion beam. Specifically, theboron purity percentage may be increased, while the F/B ratio maydecrease. In other words, the change in the composition of the ion beammay occur without the use of the second source gas.

FIG. 3 shows another embodiment. In this embodiment, the ion source 300has a chamber separator 390 disposed within the chamber, effectivelyseparating the chamber into a first sub-chamber 305 a and a secondsub-chamber 305 b. Each of first sub-chamber 305 a and secondsub-chamber 305 b has a respective aperture 340 a, 340 b. Additionally,the ground electrode 350 and extraction suppression electrode 330 may bemodified to have two openings, corresponding to apertures 340 a, 340 b.As before, the chamber has a dielectric window 125 and an RF antenna 120disposed thereon. In this embodiment, the first source gas is stored infirst source gas container 170 and is introduced to the secondsub-chamber 305 b through the gas inlet 110. The first source gas is anyof the species described above. The second source gas is stored in thesecond source gas container 171 and is introduced to the secondsub-chamber 305 b through the second gas inlet 111. The second sourcegas is any of the species described above. As described with respect toFIG. 1B, in some embodiments, the first source gas container 170 and thesecond source gas container 171 may be connected to a single gas inlet.In another embodiment, illustrated in FIG. 1C, the first and secondsource gasses may be mixed in a single source gas container.Additionally, in some embodiments, the second source gas is not used, asdescribed above. As described above, the ratio of the first source gasto the second source gas may be about 9:1, although other ratios may beused. The combined flow rate may be between 10 and 20 sccm. Argon isstored in third source gas container 172 and introduced to the firstsub-chamber 305 a through the third gas inlet 112.

In this embodiment, an argon ion beam 380 a is extracted throughaperture 340 a. Concurrently, a dopant ion beam 380 b is extractedthrough aperture 340 b. This dopant ion beam 380 b containsboron-containing ions, as well as fluorine ions, and other ion species.

In FIG. 3, the argon ion beam 380 a and the dopant ion beam 380 b areparallel to one another so that they strike the workpiece 160 atdifferent locations. In this embodiment, the workpiece is scanned in thedirection indicated by arrow 370. In this way, each location on theworkpiece 160 is first implanted by dopant ion beam 380 b, and thenstruck by argon ion beam 380 a. As described above, the argon ion beam380 a may serve to sputter deposition layer material from the surface ofthe workpiece 160, which was deposited during the implant of dopant ionbeam 380 b.

As explained above, the argon implant may remove material from thesurface deposition layer, which is difficult to remove using wetchemistry.

In another embodiment, the argon ion beam 380 a and the dopant ion beam380 b are directed or focused so that they simultaneously strike alocation on the workpiece 160. In this embodiment, the workpiece 160 canbe scanned in any direction.

In yet another embodiment, the two implants may be sequentially, suchthat the entire workpiece 160 is implanted by the dopant ion beam 380 b.At a later time, an argon ion beam 380 a is directed toward theworkpiece 160.

In each of the embodiments described herein and associated with FIG. 3,the implants may be performed without mass analysis, such that all ofthe extracted ions strike the workpiece.

In one test, a first workpiece, implanted in the conventional manner,was compared to a second workpiece implanted using the apparatus of FIG.3. Both were implanted with a combination of B₂F₄ and GeH₄. Theconcentration of boron at the surface of each workpiece after theimplantation process was then measured. The first workpiece had aconcentration of boron at the surface of roughly 9E+20 atoms/cc, whilethe second workpiece had a concentration of boron at the surface ofroughly 5E+20 atoms/cc, representing a reduction of over 40%. This maybe due to the sputtering effect of argon.

Furthermore, although the embodiments disclosed herein describe the useof argon as the third source gas, the disclosure is not limited to thisembodiment. As stated above, other noble gasses, such as helium, neon,krypton and xenon, may also be used as the third source gas.Alternatively, a combination of noble gasses may serve as the thirdsource gas.

The embodiments described herein have many advantages. As describedabove, the introduction of a third source gas may affect the compositionof the extracted ion beam. For example, the percentage of pure dopantions may increase. Further, the ratio of fluorine-containing ions topure dopant ions may decrease. These changes to the composition of theion beam may change the concentration of fluorine and dopant in theimplanted workpiece. For example, as described above, in one test, theamount of fluorine at a depth of 40 nm in the workpiece was decreased by25% through the use of a third source gas. Additionally, theconcentration of dopant at all depths was increased.

Additionally, the use of an ion source having sub-chambers, where onesub-chamber creates a dopant ion beam and the second sub-chamber createsan argon ion beam, may decrease the surface concentration of dopant onan implanted workpiece. As described above, in one test, theconcentration of boron at the surface of an implanted workpiece wasdecreased by 40% by subjecting the workpiece to an argon ion bean, asillustrated in FIG. 3.

The present disclosure is not to be limited in scope by the specificembodiments described herein. Indeed, other various embodiments of andmodifications to the present disclosure, in addition to those describedherein, will be apparent to those of ordinary skill in the art from theforegoing description and accompanying drawings. Thus, such otherembodiments and modifications are intended to fall within the scope ofthe present disclosure. Furthermore, although the present disclosure hasbeen described herein in the context of a particular implementation in aparticular environment for a particular purpose, those of ordinary skillin the art will recognize that its usefulness is not limited thereto andthat the present disclosure may be beneficially implemented in anynumber of environments for any number of purposes. Accordingly, theclaims set forth below should be construed in view of the full breadthand spirit of the present disclosure as described herein.

What is claimed is:
 1. A method of implanting dopant into a workpiece,comprising: introducing a first source gas into a first sub-chamber of achamber of an ion source, the first source gas comprising a dopant andfluorine; introducing argon into a second sub-chamber of the chamber;ionizing the first source gas and the argon in the chamber; extractingions from the first sub-chamber as a dopant ion beam and directing thedopant ion beam toward the workpiece; and extracting ions from thesecond sub-chamber as an argon ion beam and directing the argon ion beamtoward the workpiece, where the argon ion beam strikes a location on theworkpiece concurrently or after the location has been implanted by thedopant ion beam.
 2. The method of claim 1, further comprising:introducing a second source gas into the first sub-chamber, the secondsource gas comprising hydrogen and at least one of silicon andgermanium; ionizing the second source gas in the first sub-chamber; andextracting ions of the second source gas as part of the dopant ion beam.3. The method of claim 1, wherein the dopant ion beam and the argon ionbeam are focused so as to simultaneously strike the location of theworkpiece.
 4. The method of claim 1, further comprising: scanning theworkpiece, so that the location on the workpiece is implanted by thedopant ion beam before being struck by the argon ion beam.
 5. The methodof claim 1, wherein the dopant comprises boron.
 6. The method of claim5, wherein a concentration of boron at a surface of the workpiece isreduced 40% by the use of the argon ion beam.
 7. An apparatus forprocessing a workpiece, comprising: an ion source having a chamberdefined by chamber walls; a chamber separator disposed in the chamber toseparate the chamber into a first sub-chamber and a second sub-chamber,the first sub-chamber having a first aperture and the second sub-chamberhaving a second aperture; a first source gas container, containing adopant and fluorine, in communication with the first sub-chamber; athird source gas container, containing a noble gas, in communicationwith the second sub-chamber; and an extraction suppression electrode toattract ions from within the first sub-chamber and the secondsub-chamber toward a workpiece.
 8. The apparatus of claim 7, wherein thedopant comprises boron.
 9. The apparatus of claim 7, further comprisinga second source gas container, containing hydrogen and at least one ofsilicon and germanium, in communication with the first sub-chamber. 10.The apparatus of claim 7, wherein the extraction suppression electrodecomprises two apertures, corresponding to the first and second aperturesin the ion source, to attract ions from the first sub-chamber and thesecond sub-chamber.
 11. The apparatus of claim 10, wherein a dopant ionbeam exits the first sub-chamber through the first aperture and a noblegas ion beam exits the second sub-chamber through the second aperture.12. The apparatus of claim 11, wherein the extraction suppressionelectrode is configured such that the dopant ion beam and the noble gasion beam are parallel as they strike the workpiece.
 13. The apparatus ofclaim 12, further comprising scanning means whereby the workpiece isscanned such that each location on the workpiece is first implanted bydopant ion beam, and then struck by noble gas ion beam.
 14. Theapparatus of claim 11, wherein the extraction suppression electrode isconfigured such that the dopant ion beam and the noble gas ion beam aredirected or focused so that they simultaneously strike a location on theworkpiece.
 15. The apparatus of claim 7, wherein the noble gas comprisesargon.
 16. The apparatus of claim 7, wherein the noble gas is selectedfrom the group consisting of helium, neon, krypton and xenon.
 17. Anapparatus for processing a workpiece, comprising: an ion source, havinga chamber defined by chamber walls; a first source gas container,containing a dopant and fluorine, in communication with the chamber; asecond source gas container, containing hydrogen and at least one ofsilicon and germanium, in communication with the chamber; a third sourcegas container, container at least one gas selected from the groupconsisting of helium, argon, xenon, neon, and krypton, in communicationwith the chamber; an RF antenna disposed on a dielectric window in oneof the chamber walls; an extraction suppression electrode to attractions from within the chamber through an aperture in another of thechamber walls toward the workpiece; and a workpiece support to hold theworkpiece.
 18. The apparatus of claim 17, wherein the dopant comprisesboron.
 19. The apparatus of claim 17, wherein the ions attracted by theextraction suppression electrode are implanted into the workpiecewithout being mass analyzed.